600W RF 13.56 MHz Power Supply with Automatic Matching Network

1200W DC Power Supply

Rotated Substrate Stage

Heated Substrate Stage up to 500°C for 4" or 6" Substrate

One 100sccm MFC for Argon

• other options available - up to 2 additional MFC's for other gases 
• or 1 or 2 Metering Valves for additional gases

Turbomolecular Pumping system with Dry Scroll Backing pump, to achieve 10E-6Torr range in 40 minutes 

Quartz Crystal Thickness Monitor

Full Range Vacuum Gauge

Contact Us for further details and pricing.