 Model No: EB-4P-6KW-HOT
- Turbo molecular pump with a backing rotary pump
- Vacuum less than 10E-6 torr
- SS chamber with viewports, Front door opening to suit the application
- Necessary Gate, foreline, vent valves
- 4 pocket (7cc each) E-Beam sources with shutter
- 6 kW High voltage power supply
- X-Y sweep supply
- Substrate rotation, and heating with temperature monitoring
- Quartz Dual Sensor Rate/Thickness Monitor
- System controls, interlocks, readouts etc.
- Other Customer specified accessories can be met
- Simple Laboratory Electron Beam System
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