Thermal Evaporation System
Introduction
Vacuum evaporation is one of the most cost-effective deposition techniques. It’s also one of the oldest techniques, considering that Thomas Edison himself stated “the uses of this invention are unlimited.”
Edison was not correct, however, as thermal evaporation has a number of limitations including evaporation temperature, composition of alloys and compounds and life of the source. Recently, thermal evaporation has found numerous applications for depositing organic materials such as OLED (organic light emitting diodes).
Description
Torr thermal evaporators are named using the model’s description. For example, Th3-2kw is a thermal evaporation system of 3 power sources with a 2kw power supply. Torr’s current production of thermal evaporators is with box- or D-shaped chambers with as many as sources specified. Torr also makes classical systems with stainless steel or glass bell jars. Torr’s standard vacuum system is with turbo or cryo pump; systems with diffusion pumps are also available.
Substrate stages can hold one or multiple samples—flat or domed shape, with and without rotation, simple or with tilt angle, water or LN2 cooled or heated up to 10000C, suitable for liftoff or mask change without breaking vacuum. Torr also makes PLC, or PC-controlled systems, with and without lod lock or glove box adaptation.
Specifications
- Electro-Polished Stainless Steel Chamber (D-shaped box)
- 4” Diameter View Port on Front Door with Manual Shutter
- Turbo Molecular Vacuum Pumping System with Matching Dual Stage Rotary Vane Pump
- Quartz Crystal Thickness Sensor with Deposition Controller
- Full Range Vacuum Gauge with Digital Display and Readout
- Up to Four Resistive Thermal Sources with Individual Shutters
- PLC Controlled System
Options
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