Deposition Source Materials

Alloys & Cements

 
Material Symbol
Aluminum Copper Al/Cu
Aluminum Silicon Al/Si
Aluminum Silicon Copper Al/Si/Cu
Aluminum Titanium Al/Ti
Chromium Manganese Palladium Cr/Mn/Pd
Chromium Manganese Platinum Cr/Mn/Pt
Chromium Molybdenum Cr/Mo
Chromium Ruthenium Cr/Ru
Chromium Silicon Oxide Cr/SiO
Chromium Vanadium Cr/V
Cobalt Chromium Co/Cr
Cobalt Chromium Nickel Co/Cr/Ni
Cobalt Chromium Platinum Co/Cr/Pt
Cobalt Chromium Tantalum Co/Cr/Ta
Cobalt Chromium Tantalum Platinum Co/Cr/Ta/Pt
Cobalt Iron Co/Fe
Cobalt Iron Boron Co/Fe/B
Cobalt Iron Chromium Co/Fe/Cr
Cobalt Iron Zirconium Co/Fe/Zr
Cobalt Nickel Co/Ni
Cobalt Nickel Chromium Co/Ni/Cr
Cobalt Nickel Iron Co/Ni/Fe
Cobalt Niobium Hafnium Co/Nb/Hf
Cobalt Niobium Iron Co/Nb/Fe
Cobalt Niobium Titanium Co/Nb/Ti
Cobalt Platinum Co/Pt
Cobalt Zirconium Niobium Co/Zr/Nb (CZN)
Cobalt Zirconium Rhodium Co/Zr/Rh
Cobalt Zirconium Tantalum Co/Zr/Ta (CZT)
Copper Nickel Cu/Ni
Iron Aluminum Fe/Al
Iron Cobalt Fe/Co
Iron Rhodium Fe/Rh
Iron Tantalum Fe/Ta
Iron Tantalum Chromium Fe/Ta/Cr
Manganese Iridium Mn/Ir
Manganese Palladium Platinum Mn/Pd/Pt
Manganese Platinum Mn/Pt
Manganese Rhodium Mn/Rh
Manganese Ruthenium Mn/Ru
Nickel Chromium Ni/Cr
Nickel Chromium Silicon Ni/Cr/Si
Nickel Cobalt Iron Ni/Co/Fe
Nickel Iron Ni/Fe
Nickel Iron Chromium Ni/Fe/Cr
Nickel Iron Rhodium Ni/Fe/Rh
Nickel Iron Zirconium Ni/Fe/Zr
Nickel Manganese Ni/Mn
Nickel Vanadium Ni/V
Tungsten Titanium W/Ti

Nitrides

 
Material Symbol
Aluminum Nitride AlN
Boron Nitride BN
Niobium Nitride NbN
Silicon Nitride Si3N4
Tantalum Nitride TaN
Titanium Nitride TiN
Vanadium Nitride VN
Zirconium Nitride ZrN Si3N4/TiN

Oxides

 
Material Symbol
Aluminum Oxide Al2O3
Antimony Oxide Sb2O3
Ba Sr Titanate BST
Barium Oxide BaO
Barium Titanate BaTiO3
Bismuth Oxide Bi2O3
Bismuth Titanate Bi4Ti3O12
Chromium Oxide Cr2O3
Copper Oxide CuO
Hafnium Oxide HfO2
Indium Oxide In2O3
Indium Tin Oxide ITO
Lanthanum Aluminate LaAlO3
Lanthanum Oxide La2O3
Lead Titanate PbTiO3
Lead Zirconate PbZrO3
Lead Zirconate-Titanate PZT
Lithium Niobate LiNbO3
Magnesium Oxide MgO
Molybdenum Oxide MoO3
Niobium Pentoxide Nb2O5
Rare Earth Oxides RE2O3
Silicon Dioxide SiO2
Silicon Monoxide SiO
Strontium Oxide SrO
Strontium Titanate SrTiO3
Tantalum Pentoxide Ta2O5
Tin Oxide SnO2
Titanium Dioxide TiO2
Tungsten Oxide WO3
Yttrium Oxide Y2O3
Zinc Oxide ZnO
Zirconium Oxide ZrO2

Others

 
Material Symbol
Bismuth Telluride Bi(2)Te(3)
Cadmium Selenide CdSe
Cadmium Sulfide CdS
Lead Selenide PbSe
Lead Sulfide PbS
Lead Telluride PbTe
Molybdenum Selenide MoSe(2)
Molybdenum Sulfide MoS(2)
Stainless Steel  
Zinc Selenide ZnSe
Zinc Sulfide ZnS
Zinc Telluride ZnTe

Carbides

 
Material Symbol
Boron Carbide B4C
Chromium Carbide Cr3C2
Molybdenum Carbide Mo2C
Niobium Carbide NbC
Silicon Carbide SiC
Tantalum Carbide TaC
Titanium Carbide TiC
Tungsten Carbide WC
Vanadium Carbide VC
Zirconium Carbide ZrC

Borides

 
Material Symbol
Chromium Boride CrB2
Lanthanum Boride LaB6
Molybdenum Boride Mo2B5
Niobium Boride NbB2
Tantalum Boride TaB2
Titanium Boride TiB2
Tungsten Boride W2B
Vanadium Boride VB2
Zirconium Boride ZrB2

Silicides

 
Material Symbol
Chromium Silicide CrSi(2)
Molybdenum Silicide MoSi(2)
Niobium Silicide NbSi(2)
Platinum Silicide PtSi
Tantalum Silicide TaSi(2)
Titanium Silicide TiSi(2)
Tungsten Silicide WSi(2)
Vanadium Silicide VSi(2)
Zirconium Silicide ZrSi(2)

Precious Alloys

 
Material Symbol
Gold Antimony Au/Sb
Gold Arsenic Au/As
Gold Copper Au/Cu
Gold Germanium Au/Ge
Gold Nickel Au/Ni
Gold Nickel Indium Au/Ni/In
Gold Palladium Au/Pd
Gold Phosphorus Au/P
Gold Silicon Au/Si
Gold Silver Platinum Au/Ag/Pt
Gold Tin Au/Sn
Gold Zinc Au/Zn
Manganese Platinum Mn/Pt
Palladium Lithium Pd/Li
Palladium Manganese Pd/Mn
Palladium Nickel Pd/Ni
Palladium Rhenium Pd/Re
Platinum Iridium Pt/Ir
Platinum Palladium Pt/Pd
Platinum Rhodium Pt/Rh
Silver Copper Ag/Cu
Silver Gold Ag/Au
Silver Palladium Ag/Pd
Silver Titanium Ag/Ti