Thin Film Source Reference

Element Melting Point (°C) Z-Ratio Density Temperature at Torr 10-8 Temperature at Torr 10-6 Temperature at Torr 10-4 Method of Evaporation Crucible Boat Sputter Notes
Aluminum 660 1.080 2.700 677° C 821° C 1010° C E-Beam, Thermal TiB2-BN,ZrB2, BN TiB2,W RF, DC Alloys & Wets
Barium 710 2.100 3.780 545° C 627° C 735° C E-Beam Metals W, Ta,Mo RF Wets without alloying
Boron 2100 0.389 2.360 1278° C 1548° C 1797° C E-Beam, Sputtering C, VC C RF Material explodes with rapid cooling
Cadmium Subli. 3.260 2.250 1657° C 1867° C 2137° C E-Beam Al2O3,Quartz W, Cb,Mo, Ta RF, DC Poisons vacuum system
Carbon 1890 0.305 7.200 837° C 977° C 1157° C E-Beam, Sputtering     RF E-Beam performed arc evaporation
Chromium 1083 0.437 8.930 727° C 857° C 1017° C E-Beam, Thermal, Sputtering VC W, Cr RF, DC Films very adherent
Copper 321 0.680 8.640 64° C 120° C 180° C E-Beam, Sputtering Al2O3,Mo, Ta Mo RF, DC Films NOT very adherent; intermediary. layer required
Germanium 937 0.516 5.350 812° C 957° C 1167° C E-Beam Al2O3,Quartz W, Cb,Mo,Ta RF, DC Excellent films from E-Beam source
Gold 1062 0.381 19.320 807° C 947° C 1132° C E-Beam, Thermal, Sputtering BN, VC,Al2O3 W, C,Ta W Films soft NOT very adherent
Iron 1535 0.349 7.860 858° C 998° C 1180° C E-Beam, Sputtering Al2O3,BeO W, Mo,Al2O3 RF, DC Attacks W films hard, smooth
Lead 328 1.130 11.300 342° C 427° C 497° C E-Beam Al2O3,Quartz W RF, DC TOXIC, Careful control of rates required
Magnesium 651 1.610 1.740 185° C 247° C 327° C E-Beam Al2O3,VC W, Mo,Ta, Cb RF, DC Extremely high rates possible
Molybdenum 2610 0.257 10.220 1592° C 1822° C 2117° C E-Beam, Sputtering     RF, DC Films hard, smooth
Nickel 1453 0.331 8.910 927° C 1072° C 1262° C E-Beam Al2O3,BeO W RF, DC Alloys with refractory metals
Platinum 1769 0.245 21.400 1292° C 1492° C 1747° C E-Beam, Sputtering C, ThO2 W RF, DC Alloys with metals
Silicon 1410 0.712 2.320 992° C 1147° C 1337° C E-Beam BeO,Ta W, Ta RF, DC Alloys with W
Silver 961 0.529 10.490 847° C 958° C 1105° C E-Beam, Thermal Al2O3,Mo Mo, Ta W Evaporates well with any source
Tin 232 0.724 7.300 682° C 807° C 997° C E-Beam Al2O3 Mo RF, DC Wets Mo
Titanium 1675 0.628 4.500 1067° C 1235° C 1453° C E-Beam, Sputtering TiC W RF, DC Alloys with refractory metals
Tungsten 3410 0.163 19.300 2117° C 2407° C 2757° C E-Beam, Sputtering     RF, DC Forms VOLATILE oxides
Zinc 419 0.514 7.040 127° C 177° C 250° C E-Beam Al2O3,Quartz W, Mo, Ta RF, DC Evaporates well