WHICH DEPOSITION TECHNIQUE TO CHOOSE?: THERMAL, E-BEAM or SPUTTERING?
|
|||
---|---|---|---|
TECHNIQUE
|
Resistance Heated Sources, Filaments, Boats or Ovens
|
Electron Beam
Deposition |
Sputtering
|
ADVANTAGES & CONSIDERATIONS
|
- Simplistic Arrangement |
- Desirable Rate Control
- Limited Contamination of Source Material - High Temperature Source - Material Can Be Used (Including W & C) - Increased Costs Considering Size of Source, Power Supply & Control System |
- Technology of Sputtering is |